Detect process liquids with sensors in contact with media

Semiconductor manufacturing involves many wet processes, such as cleaning with ultra-pure water, which is carried out several times throughout the production cycle. Other processes, such as etching, require aggressive chemicals. Regardless of the process, the required liquids must be stored in tanks and their levels monitored.

However, measuring the level of corrosive chemicals can pose a particular challenge for sensors, especially if the tank wall interferes with sensor detection from the outside. In this case, our capacitive sensors with PTFE-coated housing are the right choice. These can detect the level of highly conductive media like acids and alkalis in direct contact with the process liquid. This confirmation means that etching, the application of a resistant, development after lithography or chemical-mechanical polishing and cleaning wafers can begin as planned.

The housing materials of our level sensors are made of stainless steel or chemically resistant plastics such as PTFE or PEEK, which are inert and very heat-resistant and can withstand very aggressive acids.

This makes our media-contacting sensors well-suited for automation in the semiconductor industry.

Products for media-contacting level monitoring in the semiconductor industry

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