Wafer centering with customized solutions

In semiconductor production, precise and reliable centering of the wafers is crucial in every process step. The wafers must be positioned in the process chambers with extreme accuracy and in a specific alignment. As the end effectors of the handling robots do not actually "grip" the wafer but only lift it, the exact position must be determined. This is necessary to ensure uniform processing of the wafer and to avoid errors such as uneven removal or deformation.

With the help of our customized solutions, wafers can be placed exactly in the intended position. Aligning the wafer on the fly, for example, can be done extremely reliably with two Micromote photoelectric sensors. Their high-precision signals make it possible to calculate the offset to the ideal line if the two light barriers are not switched simultaneously. Thanks to our microspot technology, you can correct the wafer during the movement as the sensors precisely detect the sharp edges of the wafer.

In order to detect the positioning as accurately as possible, our amplifiers for optical sensor heads operate with a particularly high switching frequency.

Products for centering wafers

We can help you get the best out of your systems